| Summary |
µFOCUS 450 multi energy lines
small spot X-ray monochromator |
High Performance Monochromatic X-Ray Source |
High performance small-spot
monochromatic X-ray source |
Small Spot µ-FOCUS 600
X-Ray Monochromator for NAP |
10 μmX-ray monochromator source for small spot XPS |
X-Ray Source |
Near Ambient Pressure X-Ray Source |
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| Operation |
| Power |
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400 W for Al, 600 W for Ag |
<180W for Al anode |
180 W for Al anode |
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300 W / 400 W for Mg/Al
Zr 100 W, Ag and Cu 600 W
all other anode materials 400 W |
300W / 400W for Mg/Al
Zr 100 W, Ag and Cu 600 W
all other anode materials 400 W |
| Maximum Anode Voltage |
15 kV for Al/Ag/Ti
30 kV for Cr |
15 kV |
15 kV |
15 kV |
15 kV |
15 kV |
15 kV |
| Working Conditions |
UHV,NAP (optionally) |
UHV |
UHV |
UHV and NAP |
UHV to >100 mbar |
UHV |
UHV and NAP |
| dual anode |
Any combination possible |
Yes |
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n.a. |
Al Kα / Ag Lα OR Ti Kα / Cr Kα |
Yes |
Yes |
| Monochromated |
Yes |
Yes |
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Yes |
Yes |
No |
No |
| Required Accessories |
Closed-Cycle Water Cooling System |
CCX 70 Isolation Unit
Closed-Cycle Water Cooling |
CCX 70 Isolation Unit
Closed-Cycle Water Cooling System |
CCX 70 Isolation Unit
Differential pumping
Closed-Cycle Water Cooling System |
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CCX 70 Isolation Unit
Closed-Cycle Water Cooling System |
CCX 70 Isolation Unit
Differential PumpingPackage
Closed-Cycle Water Cooling System |
| Optional Accessories |
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Differential pumping
BIS attachment |
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n.a. |
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50 or 100 mm Z-shift customized length |
50 or 100 mm Z-shift |
| Performance |
| Anode Materials Available |
Al anode(1487 eV)
Ag anode (2984 eV)
Ti anode (4511 eV)
Cr anode (5414 eV) |
Al, Ag |
Al anode (1486.7 eV) |
Al anode |
Al (Al Kα radiation) |
Standard Mg/Al
Other materials available:
Ag, Cu, Cr, Yt, Ti, Zr, Au, Si |
Standard Mg/Al
Other materials available:
Ag, Cu, Cr, Yt, Ti, Zr, Au, Si |
| Power Supply |
COSCON XMS |
UXC 1000 |
UXC 1000 Universal X-Ray Source Control |
UXC 1000 Universal X-Ray Source Control |
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UXC 1000 |
UXC 1000 |
| Mounting Flange |
DN100 CF |
DN100 CF |
DN100 CF |
DN100 CF |
DN 275 CF |
DN40 CF |
DN40 CF |
| Insertion Depth |
170mm |
FOCUS 500: 177 mm
FOCUS 600: 254 mm |
µFOCUS 500: 177 mm
µFOCUS 600: 254 mm |
µ-FOCUS 500: 177 mm
µ-FOCUS 600: 254 mm |
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283 mm |
275 mm |
| Rowland Circle Diameter |
450 mm for Al line
416 mm for Ag line
383 mm for Ti line
676 mm for Cr line |
500 mm for FOCUS 500
600 mm for FOCUS 600 |
500 mm for µFOCUS 500
600 mm for µFOCUS 600 |
500 mm for µ-FOCUS 500 NAP
600 mm for µ-FOCUS 600 NAP |
195 mm |
n. a. |
n. a. |
| Mount |
| Cross talk |
- |
n. a. |
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n.a. |
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< 0.35% |
< 0.35% |
| Spot Size |
< 100µm to > 500 µm for Al
< 100 µm to > 500 µm for Ag
< 150 µm to > 500 µm for Ti
< 200 µm to > 500 µm for Cr |
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< 200 µm to > 1 mm |
variable spot size: 200 µm - 1 mm |
10 - 150 µm |
10 mm at a working distance of 15 mm |
10 mm at a working distance of 15 mm |
| Energy Resolution |
< 220 meV for Al, < 400 meV for Ag
< 450 meV for Ti, < 450 meV for Cr |
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| Flux (Ph/s) |
7.5× 10^10 for Al
2.0 × 10^9 for Ag
1.4 × 10^10 for Ti
8.0 × 10^9 for Cr (at Maximum Power) |
2.3 × 10^11 photons/s
(Al 400 W, FOCUS 500)
1.6 × 10^11 photons/s
(Al 400 W, FOCUS 600) |
up to 2x10^10 photons/s for Al |
1.9 x 10^10 photons/s |
In Small Spot Mode (10 µm spot size):
1.4 x 10^9 photons/s
In High Flux Mode (150 µm spot size):
3.3 x 10^10 photons/s |
8.0 x 10^10 photons/s
(Mg Kα, 300 W, working distance 20 mm)
8.3 x 10^10 photons/s
(Al Kα, 300 W, working distance 20 mm) |
4.0 x 10^10 photons/s
(Mg Kα, 300 W, working distance 20 mm)
4.1 ×10^10 photons/s
(Al Kα, 300 W, working distance 20 mm) |
| Flux (Ph/s) at Smallest Spot Size |
8.0× 10^9 for Al
5.0 × 10^8 for Ag
3.6 × 10^9 for Ti
2.0 × 10^9 for Cr |
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