EBIC acquisition

The best quantitative electronics and software for Electron Beam Induced Current(EBIC)​

Make the link between device characterization and materials properties

• Image electrical activity across complete devices
• Distinguish between electrically active and passive defects
• Correlate electrical activity with composition (EDS) and crystallographic structure (EBSD)

Localise electrical defects with highest resolution

• Enable sample preparation for TEM or atom probe microscopy
• Avoid alignment errors by directly imaging defects with EBIC in FIB SEM
• Use live EBIC imaging to stop milling during sample preparation

Map junctions and defects over large areas

• Identify all electrically active defects
• Map active areas of junctions and electrical fields
• Validate doping profiles and areas

Export calibrated EBIC signal for analysis of materials properties

• Measure defect contrast / recombination strength
• Extract diffusion length of minority charge carriers
• Determine width of depletion regions

Verify device operation modes with built-in biasing and live overlay

• Image junctions and fields in delayered devices
• Map electrical activity in solar cells under bias
• Compare imaged behaviour with device modelling

Access third dimension with depth profiling

• Manipulate depth of EBIC signal by changing kV in SEM
• Investigate EBIC images of cross-sections in FIB-SEM
• Export EBIC depth series for 3D reconstruction